摘要：<h3 _msttexthash="7124715" _msthash="80" style="box-sizing:border-box;line-height:1.1;margin:0px 10px 20px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:10px 0px;border-width:0px 0px 1px;border-top-style:initial;border-right-style:initial;border-bottom-style:solid;border-left-style:initial;border-top-color:initial;border-right-color:initial;border-bottom-color:#333333;border-left-color:initial;border-image:initial;outline:0px;vertical-align:baseline;"> <span style="font-size:12px;">1 概述</span> </h3> <p _msttexthash="4209503350" _msthash="81" style="box-sizing:border-box;margin:0px 10px 30px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:0px;border:0px;outline:0px;vertical-align:baseline;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">作為物質(zhì)（材料）的電導(dǎo)率（電導(dǎo)率的難易程度）的量度，通常使用（電）電阻。 每單位體積（1cm×1cm×1cm）的電阻值是體積電阻率（單位Ω?cm）。 該值是物質(zhì)特有的**值，通過恒流I（A）穿過橫截面積W×t并測量相隔距離L的電極之間的電位差V（V）獲得，如</span><span style="font-size:12px;">[圖3.1體積電阻率（ρv，Ω?cm）</span><span style="font-size:12px;">的定義]所示。</span><span style="font-size:12px;">如何測量表面電阻率</span> </p> <p _msttexthash="106096848" _msthash="82" style="box-sizing:border-box;margin:0px 10px 30px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:0px;border:0px;outline:0px;vertical-align:baseline;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">圖3.1 體積電阻率的定義（ρv，Ω?cm）</span> </p> <div class="js-unit_group-align acms-entry-unit-full acms-col-sm-6" style="box-sizing:border-box;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;margin:0px;padding:0px;border:0px;outline:0px;vertical-align:baseline;min-height:1px;float:left;width:342.5px;"> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;padding:0px;clear:both;visibility:hidden;" /> <div class="column-image-auto nocaption" style="box-sizing:border-box;margin:0px 0px 20px;padding:0px 10px;border:0px;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;max-width:100%;float:none;width:320px;"> <img class="columnImage" src="https://www.n-analytech.co.jp/archives/001/201602/aef9063a96efa8e03553c5e480567717.gif" alt="" width="300" height="220" data-bd-imgshare-binded="1" style="box-sizing:border-box;vertical-align:middle;height:auto;margin:0px;padding:0px;outline:0px;background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-attachment:initial;background-origin:initial;background-clip:initial;" /> </div> </div> <div class="js-unit_group-align acms-entry-unit-full acms-col-sm-6" style="box-sizing:border-box;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;margin:0px;padding:0px;border:0px;outline:0px;vertical-align:baseline;min-height:1px;float:left;width:342.5px;"> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;padding:0px;clear:both;visibility:hidden;" /> <div class="column-image-auto js_notStyle acms-col-sm-6 nocaption" style="box-sizing:border-box;margin:0px 0px 20px;padding:0px 10px;border:0px;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;max-width:100%;min-height:1px;float:none;width:auto !important;"> <img class="columnImage" src="https://www.n-analytech.co.jp/archives/001/201602/5e7b1380b1d3b14d8d0758c2541ace26.gif" alt="" width="150" height="76" data-bd-imgshare-binded="1" style="box-sizing:border-box;vertical-align:middle;height:auto;margin:0px;padding:0px;outline:0px;background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-attachment:initial;background-origin:initial;background-clip:initial;" /> </div> </div> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <h3 _msttexthash="36105082" _msthash="83" style="box-sizing:border-box;line-height:1.1;margin:0px 10px 20px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:10px 0px;border-width:0px 0px 1px;border-top-style:initial;border-right-style:initial;border-bottom-style:solid;border-left-style:initial;border-top-color:initial;border-right-color:initial;border-bottom-color:#333333;border-left-color:initial;border-image:initial;outline:0px;vertical-align:baseline;"> <span style="font-size:12px;">2 四端子法和雙端子法</span> </h3> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <p _msttexthash="5565703923" _msthash="84" style="box-sizing:border-box;margin:0px 10px 30px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:0px;border:0px;outline:0px;vertical-align:baseline;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">但是，在實(shí)際確定樣品的體積電阻率時，使用四端法，如[</span><span style="font-size:12px;">圖3.2.1四端法和兩端法的電極結(jié)構(gòu)]所示。</span><span style="font-size:12px;">&nbsp;該方法用于通過消除施加恒定電流（電流電極和樣品表面之間）時由于界面現(xiàn)象引起的稱為接觸電阻的壓降來確定樣品的真實(shí)體積電阻率。 換句話說，在四端子方法中，通過將電流應(yīng)用端子和電壓測量端子分開，消除了接觸電阻的影響，并且可以進(jìn)行高精度測量。</span><span style="font-size:12px;">如何測量表面電阻率</span> </p> <p _msttexthash="5971610957" _msthash="85" style="box-sizing:border-box;margin:0px 10px 30px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:0px;border:0px;outline:0px;vertical-align:baseline;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">此時，電壓表的輸入阻抗必須保持高，以免電流流入電壓測量端子。 實(shí)際上，分別使用四端法和兩端法測量同一樣品（銅基導(dǎo)電涂層膜）電阻的結(jié)果顯示在[</span><span style="font-size:12px;">圖3.2.2使用四端法和兩端法的電阻值比較]。</span><span style="font-size:12px;">&nbsp;該狀態(tài)由等效電路表示[圖</span><span style="font-size:12px;">3.2.3四端子法和兩端法之間的等效電路]。</span><span style="font-size:12px;">&nbsp;在兩端方法中，可以看出由于接觸電阻的影響，電阻很高。 這種接觸電阻很難定量測量，因為它取決于樣品的表面狀況。</span> </p> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <div class="column-image-center" style="box-sizing:border-box;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;margin:0px auto 10px;padding:0px 10px;border:0px;outline:0px;vertical-align:baseline;float:none;text-align:center;max-width:100%;width:370px;"> <img class="columnImage" src="https://www.n-analytech.co.jp/archives/001/201602/b9df4e0b11963726a27fa8fc3a4f2c57.gif" alt="" width="350" height="350" data-bd-imgshare-binded="1" style="box-sizing:border-box;vertical-align:middle;height:auto;margin:0px;padding:0px;outline:0px;background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-attachment:initial;background-origin:initial;background-clip:initial;" /> <p class="caption" _msttexthash="81778567" _msthash="86" style="box-sizing:border-box;margin:0px 10px 30px;padding:0px;border:0px;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">圖3.2.1 四端法和兩端法的電極結(jié)構(gòu)</span> </p> </div> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <div class="column-image-center" style="box-sizing:border-box;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;margin:0px auto 10px;padding:0px 10px;border:0px;outline:0px;vertical-align:baseline;float:none;text-align:center;max-width:100%;width:420px;"> <img class="columnImage" src="https://www.n-analytech.co.jp/archives/001/201602/96280c170acc4bf50ee3a80de3b98883.gif" alt="" width="400" height="200" data-bd-imgshare-binded="1" style="box-sizing:border-box;vertical-align:middle;height:auto;margin:0px;padding:0px;outline:0px;background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-attachment:initial;background-origin:initial;background-clip:initial;" /> <p class="caption" _msttexthash="92263158" _msthash="87" style="box-sizing:border-box;margin:0px 10px 30px;padding:0px;border:0px;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">圖3.2.2 四端子法和兩端法電阻值比較</span> </p> </div> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <div class="column-image-center" style="box-sizing:border-box;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;margin:0px auto 10px;padding:0px 10px;border:0px;outline:0px;vertical-align:baseline;float:none;text-align:center;max-width:100%;width:420px;"> <img class="columnImage" src="https://www.n-analytech.co.jp/archives/001/201602/1cdf8ac263b957456670b66b5b099865.gif" alt="" width="400" height="400" data-bd-imgshare-binded="1" style="box-sizing:border-box;vertical-align:middle;height:auto;margin:0px;padding:0px;outline:0px;background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-attachment:initial;background-origin:initial;background-clip:initial;" /> <p class="caption" _msttexthash="84373315" _msthash="88" style="box-sizing:border-box;margin:0px 10px 30px;padding:0px;border:0px;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">圖3.2.3 四端法和兩端法的等效電路</span> </p> </div> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <h3 _msttexthash="30548882" _msthash="89" style="box-sizing:border-box;line-height:1.1;margin:0px 10px 20px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:10px 0px;border-width:0px 0px 1px;border-top-style:initial;border-right-style:initial;border-bottom-style:solid;border-left-style:initial;border-top-color:initial;border-right-color:initial;border-bottom-color:#333333;border-left-color:initial;border-image:initial;outline:0px;vertical-align:baseline;"> <span style="font-size:12px;">3 四探頭法和四端法</span> </h3> <p _msttexthash="1939294344" _msthash="90" style="box-sizing:border-box;margin:0px 10px 30px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:0px;border:0px;outline:0px;vertical-align:baseline;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">在四探頭法中，將四個針狀電極[圖3.3.2四探頭]放在一條直線上，如[</span><span style="font-size:12px;">圖3.3.1用四探頭法測量</span><span style="font-size:12px;">]所示，在外部兩個探頭（A和D）之間傳遞恒定電流，并測量兩個內(nèi)部</span><span style="font-size:12px;">探頭</span><span style="font-size:12px;">（B和C）之間產(chǎn)生的電位差以獲得電阻。</span><span style="font-size:12px;">如何測量表面電阻率</span> </p> <p _msttexthash="1959235642" _msthash="91" style="box-sizing:border-box;margin:0px 10px 30px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:0px;border:0px;outline:0px;vertical-align:baseline;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">接下來，通過將獲得的電阻（R，單位：Ω）乘以樣品的厚度t（cm）和校正因子RCF（電阻率校正因子）來計算體積電阻率。 這樣，測量系統(tǒng)在四探針法和四端法之間是通用的，只有與樣品接觸的電極部分不同。</span><span style="font-size:12px;">如何測量表面電阻率</span> </p> <p _msttexthash="1819159095" _msthash="92" style="box-sizing:border-box;margin:0px 10px 30px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:0px;border:0px;outline:0px;vertical-align:baseline;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">只需將這種四探針探頭（四探針電極）壓在樣品上即可進(jìn)行測量，與傳統(tǒng)的四端子方法相比，無需在樣品上形成電極，工作效率大大提高。 [表3.3 四</span><span style="font-size:12px;">探頭法和四端法的比較</span><span style="font-size:12px;">] 使用四探頭法的電場圖像見[圖3.3.3四</span><span style="font-size:12px;">探頭的電場]。</span> </p> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <div class="column-image-center" style="box-sizing:border-box;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;margin:0px auto 10px;padding:0px 10px;border:0px;outline:0px;vertical-align:baseline;float:none;text-align:center;max-width:100%;width:470px;"> <img class="columnImage" src="https://www.n-analytech.co.jp/archives/001/201602/db22bf390b6d0986cb9d154cd8b1553d.gif" alt="" width="450" height="450" data-bd-imgshare-binded="1" style="box-sizing:border-box;vertical-align:middle;height:auto;margin:0px;padding:0px;outline:0px;background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-attachment:initial;background-origin:initial;background-clip:initial;" /> <p class="caption" _msttexthash="35623900" _msthash="93" style="box-sizing:border-box;margin:0px 10px 30px;padding:0px;border:0px;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">圖3.3.1 四探頭法測量</span> </p> </div> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <div class="column-image-center js_notStyle acms-col-sm-6" style="box-sizing:border-box;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;margin:0px auto 10px;padding:0px 10px;border:0px;outline:0px;vertical-align:baseline;float:none;text-align:center;max-width:100%;min-height:1px;width:342.5px;"> <img class="columnImage" src="https://www.n-analytech.co.jp/archives/001/201602/2454849d7e45cf1d9b52fbbefdd8c412.gif" alt="" width="320" height="200" data-bd-imgshare-binded="1" style="box-sizing:border-box;vertical-align:middle;height:auto;margin:0px;padding:0px;outline:0px;background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-attachment:initial;background-origin:initial;background-clip:initial;" /> <p class="caption" _msttexthash="25263095" _msthash="94" style="box-sizing:border-box;margin:0px 10px 30px;padding:0px;border:0px;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">圖3.3.2 四探頭探頭</span> </p> </div> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <div class="entry-container" style="box-sizing:border-box;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;margin:0px 10px;padding:0px;border:0px;outline:0px;vertical-align:baseline;"> <p _msttexthash="51794509" _msthash="95" style="box-sizing:border-box;margin:0px 10px 30px;padding:0px;border:0px;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">表3.3 四點(diǎn)法與四端法比較</span> </p> <table border="1" style="border-spacing:0px;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;table-layout:inherit;margin:0px 0px 10px;padding:0px;border:1px solid #333333;outline:0px;vertical-align:baseline;width:600px;"> <tbody style="box-sizing:border-box;margin:0px;padding:0px;border:0px;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <tr style="box-sizing:border-box;margin:0px;padding:0px;border:0px;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <td _msttexthash="5559528" _msthash="96" style="box-sizing:border-box;padding:10px;margin:0px;border:1px solid #BBBBBB;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <span style="font-size:12px;">部分</span> </td> <td _msttexthash="10057307" _msthash="97" style="box-sizing:border-box;padding:10px;margin:0px;border:1px solid #BBBBBB;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <span style="font-size:12px;">四個探頭</span> </td> <td _msttexthash="8556106" _msthash="98" style="box-sizing:border-box;padding:10px;margin:0px;border:1px solid #BBBBBB;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <span style="font-size:12px;">四端法</span> </td> </tr> <tr style="box-sizing:border-box;margin:0px;padding:0px;border:0px;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <td _msttexthash="11104769" _msthash="99" style="box-sizing:border-box;padding:10px;margin:0px;border:1px solid #BBBBBB;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <span style="font-size:12px;">處理樣品</span> </td> <td _msttexthash="18522634" _msthash="100" style="box-sizing:border-box;padding:10px;margin:0px;border:1px solid #BBBBBB;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <span style="font-size:12px;">沒什么特別的</span> </td> <td _msttexthash="14632332" _msthash="101" style="box-sizing:border-box;padding:10px;margin:0px;border:1px solid #BBBBBB;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <span style="font-size:12px;">加工成棒材</span> </td> </tr> <tr style="box-sizing:border-box;margin:0px;padding:0px;border:0px;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <td _msttexthash="12779494" _msthash="102" style="box-sizing:border-box;padding:10px;margin:0px;border:1px solid #BBBBBB;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <span style="font-size:12px;">電極安裝</span> </td> <td _msttexthash="43423653" _msthash="103" style="box-sizing:border-box;padding:10px;margin:0px;border:1px solid #BBBBBB;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <span style="font-size:12px;">只需將探頭按在上面即可</span> </td> <td _msttexthash="31443204" _msthash="104" style="box-sizing:border-box;padding:10px;margin:0px;border:1px solid #BBBBBB;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <span style="font-size:12px;">用漿料等制造電極</span> </td> </tr> <tr style="box-sizing:border-box;margin:0px;padding:0px;border:0px;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <td _msttexthash="14765478" _msthash="105" style="box-sizing:border-box;padding:10px;margin:0px;border:1px solid #BBBBBB;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <span style="font-size:12px;">測量裝置</span> </td> <td _msttexthash="20399821" _msthash="106" style="box-sizing:border-box;padding:10px;margin:0px;border:1px solid #BBBBBB;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <span style="font-size:12px;">洛雷斯塔系列</span> </td> <td _msttexthash="16024515" _msthash="107" style="box-sizing:border-box;padding:10px;margin:0px;border:1px solid #BBBBBB;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <span style="font-size:12px;">數(shù)字萬用表</span> </td> </tr> <tr style="box-sizing:border-box;margin:0px;padding:0px;border:0px;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <td _msttexthash="22344153" _msthash="108" style="box-sizing:border-box;padding:10px;margin:0px;border:1px solid #BBBBBB;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <span style="font-size:12px;">轉(zhuǎn)換為電阻率</span> </td> <td _msttexthash="61169381" _msthash="109" style="box-sizing:border-box;padding:10px;margin:0px;border:1px solid #BBBBBB;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <span style="font-size:12px;">一鍵式支持圓形和矩形電阻率</span> </td> <td _msttexthash="76476322" _msthash="110" style="box-sizing:border-box;padding:10px;margin:0px;border:1px solid #BBBBBB;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <span style="font-size:12px;">只能是桿形，測量后需要計算。</span> </td> </tr> <tr style="box-sizing:border-box;margin:0px;padding:0px;border:0px;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <td _msttexthash="5535829" _msthash="111" style="box-sizing:border-box;padding:10px;margin:0px;border:1px solid #BBBBBB;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <span style="font-size:12px;">是的</span> </td> <td _msttexthash="53352169" _msthash="112" style="box-sizing:border-box;padding:10px;margin:0px;border:1px solid #BBBBBB;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <span style="font-size:12px;">評估電阻率分布和薄膜厚度</span> </td> <td _msttexthash="2562456" _msthash="113" style="box-sizing:border-box;padding:10px;margin:0px;border:1px solid #BBBBBB;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <span style="font-size:12px;">―――</span> </td> </tr> <tr style="box-sizing:border-box;margin:0px;padding:0px;border:0px;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <td _msttexthash="11269713" _msthash="114" style="box-sizing:border-box;padding:10px;margin:0px;border:1px solid #BBBBBB;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <span style="font-size:12px;">總體評分</span> </td> <td _msttexthash="26564473" _msthash="115" style="box-sizing:border-box;padding:10px;margin:0px;border:1px solid #BBBBBB;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <span style="font-size:12px;">簡單準(zhǔn)確的測量</span> </td> <td _msttexthash="26125424" _msthash="116" style="box-sizing:border-box;padding:10px;margin:0px;border:1px solid #BBBBBB;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;"> <span style="font-size:12px;">需要時間來準(zhǔn)備</span> </td> </tr> </tbody> </table> </div> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <div class="column-image-center js_notStyle acms-col-sm-6" style="box-sizing:border-box;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;margin:0px auto 10px;padding:0px 10px;border:0px;outline:0px;vertical-align:baseline;float:none;text-align:center;max-width:100%;min-height:1px;width:342.5px;"> <img class="columnImage" src="https://www.n-analytech.co.jp/archives/001/201602/dd6ed1fef33045641d92645fd45eb256.gif" alt="" width="320" height="200" data-bd-imgshare-binded="1" style="box-sizing:border-box;vertical-align:middle;height:auto;margin:0px;padding:0px;outline:0px;background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-attachment:initial;background-origin:initial;background-clip:initial;" /> <p class="caption" _msttexthash="45579846" _msthash="117" style="box-sizing:border-box;margin:0px 10px 30px;padding:0px;border:0px;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">圖3.3.3 四探頭探頭的電場</span> </p> </div> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <h3 _msttexthash="29703583" _msthash="118" style="box-sizing:border-box;line-height:1.1;margin:0px 10px 20px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:10px 0px;border-width:0px 0px 1px;border-top-style:initial;border-right-style:initial;border-bottom-style:solid;border-left-style:initial;border-top-color:initial;border-right-color:initial;border-bottom-color:#333333;border-left-color:initial;border-image:initial;outline:0px;vertical-align:baseline;"> <span style="font-size:12px;">4 電阻率校正系數(shù)</span> </h3> <p _msttexthash="387622404" _msthash="119" style="box-sizing:border-box;margin:0px 10px 30px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:0px;border:0px;outline:0px;vertical-align:baseline;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">電阻率校正系數(shù)RCF（電阻率校正系數(shù)）根據(jù)樣品的形狀和尺寸以及要測量的位置而變化。</span><span style="font-size:12px;">如何測量表面電阻率</span> </p> <p _msttexthash="5030878177" _msthash="120" style="box-sizing:border-box;margin:0px 10px 30px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:0px;border:0px;outline:0px;vertical-align:baseline;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">在四探頭方法中，由于樣品大小和測量位置是任意的，因此樣品內(nèi)部的電場能量擴(kuò)散會根據(jù)樣品大小和測量位置而變化。 當(dāng)樣品體積較小或測量位置在樣品邊緣時，電場能量堆變高，電阻值增大。 （參見</span><span style="font-size:12px;">[圖3.4.1 樣品場能量分布</span><span style="font-size:12px;">]） 這是因為電場能量不能離開樣品。 電阻率校正因子用于獲得正確的體積電阻率和表面電阻率，以預(yù)測電場能量峰值的這種變化。</span> </p> <p _msttexthash="801460088" _msthash="121" style="box-sizing:border-box;margin:0px 10px 30px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:0px;border:0px;outline:0px;vertical-align:baseline;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">在這里，我將簡要說明如何找到電阻率校正因子。 樣品中任何一點(diǎn)的電位φ（r）通過在預(yù)定條件下求解泊松方程（[方程3.4.1]）來確定。</span> </p> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <div class="column-image-left js_notStyle acms-col-sm-6" style="box-sizing:border-box;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;margin:0px 0px 10px;padding:0px 10px;border:0px;outline:0px;vertical-align:baseline;float:left;max-width:100%;min-height:1px;width:342.5px;"> <img class="columnImage" src="https://www.n-analytech.co.jp/archives/001/201602/9e38a0dcc60ab93abfc76110b97b835c.gif" alt="" width="334" height="24" data-bd-imgshare-binded="1" style="box-sizing:border-box;vertical-align:middle;height:auto;margin:0px;padding:0px;outline:0px;background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-attachment:initial;background-origin:initial;background-clip:initial;" /> <p class="caption" _msttexthash="6193967" _msthash="122" style="box-sizing:border-box;margin:0px 10px 30px;padding:0px;border:0px;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">[等式3.4.1]</span> </p> </div> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <p _msttexthash="137111273" _msthash="123" style="box-sizing:border-box;margin:0px 10px 30px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:0px;border:0px;outline:0px;vertical-align:baseline;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">校正系數(shù)RCF可以從該解中確定，由[公式3.4.2]表示。</span> </p> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <p _msttexthash="657574502" _msthash="124" style="box-sizing:border-box;margin:0px 10px 30px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:0px;border:0px;outline:0px;vertical-align:baseline;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">[Loresta-GP]內(nèi)置校正因子計算軟件，只需輸入樣品形狀（矩形或圓形），尺寸和測量位置即可獲得校正因子。</span> </p> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <div class="column-image-center" style="box-sizing:border-box;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;margin:0px auto 10px;padding:0px 10px;border:0px;outline:0px;vertical-align:baseline;float:none;text-align:center;max-width:100%;width:370px;"> <img class="columnImage" src="https://www.n-analytech.co.jp/archives/001/201602/467a585acc55cc132a2b79c03505456c.gif" alt="" width="350" height="350" data-bd-imgshare-binded="1" style="box-sizing:border-box;vertical-align:middle;height:auto;margin:0px;padding:0px;outline:0px;background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-attachment:initial;background-origin:initial;background-clip:initial;" /> <p class="caption" _msttexthash="32010797" _msthash="125" style="box-sizing:border-box;margin:0px 10px 30px;padding:0px;border:0px;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">圖3.4.1 樣品場能分布</span> </p> </div> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <div class="column-image-center nocaption" style="box-sizing:border-box;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;margin:0px auto 20px;padding:0px 10px;border:0px;outline:0px;vertical-align:baseline;float:none;text-align:center;max-width:100%;width:296px;"> <img class="columnImage" src="https://www.n-analytech.co.jp/archives/001/201602/28e1310b66d2b80fe70900107fe69258.gif" alt="" width="276" height="45" data-bd-imgshare-binded="1" style="box-sizing:border-box;vertical-align:middle;height:auto;margin:0px;padding:0px;outline:0px;background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-attachment:initial;background-origin:initial;background-clip:initial;" /> </div> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <div class="column-image-center js_notStyle acms-col-sm-6 nocaption" style="box-sizing:border-box;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;margin:0px auto 20px;padding:0px 10px;border:0px;outline:0px;vertical-align:baseline;float:none;text-align:center;max-width:100%;min-height:1px;width:342.5px;"> <img class="columnImage" src="https://www.n-analytech.co.jp/archives/001/201602/461f900a060160220df948bb8a7d21e2.gif" alt="" width="278" height="255" data-bd-imgshare-binded="1" style="box-sizing:border-box;vertical-align:middle;height:auto;margin:0px;padding:0px;outline:0px;background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-attachment:initial;background-origin:initial;background-clip:initial;" /> </div> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <div class="column-image-center js_notStyle acms-col-sm-6 nocaption" style="box-sizing:border-box;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;margin:0px auto 20px;padding:0px 10px;border:0px;outline:0px;vertical-align:baseline;float:none;text-align:center;max-width:100%;min-height:1px;width:342.5px;"> <img class="columnImage" src="https://www.n-analytech.co.jp/archives/001/201602/cb74e267ed736648167d52407c646459.gif" alt="" width="144" height="45" data-bd-imgshare-binded="1" style="box-sizing:border-box;vertical-align:middle;height:auto;margin:0px;padding:0px;outline:0px;background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-attachment:initial;background-origin:initial;background-clip:initial;" /> </div> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <div class="column-image-center js_notStyle acms-col-sm-6 nocaption" style="box-sizing:border-box;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;margin:0px auto 20px;padding:0px 10px;border:0px;outline:0px;vertical-align:baseline;float:none;text-align:center;max-width:100%;min-height:1px;width:342.5px;"> <img class="columnImage" src="https://www.n-analytech.co.jp/archives/001/201602/1b811d0cd8bf98c10e5d9252f64ec872.gif" alt="" width="341" height="170" data-bd-imgshare-binded="1" style="box-sizing:border-box;vertical-align:middle;height:auto;margin:0px;padding:0px;outline:0px;background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-attachment:initial;background-origin:initial;background-clip:initial;" /> </div> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <div class="column-image-center js_notStyle acms-col-sm-6 nocaption" style="box-sizing:border-box;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;margin:0px auto 20px;padding:0px 10px;border:0px;outline:0px;vertical-align:baseline;float:none;text-align:center;max-width:100%;min-height:1px;width:342.5px;"> <img class="columnImage" src="https://www.n-analytech.co.jp/archives/001/201602/896280f087dd1d3a5c7263749e509637.gif" alt="" width="168" height="45" data-bd-imgshare-binded="1" style="box-sizing:border-box;vertical-align:middle;height:auto;margin:0px;padding:0px;outline:0px;background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-attachment:initial;background-origin:initial;background-clip:initial;" /> </div> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <div class="column-image-center js_notStyle acms-col-sm-6" style="box-sizing:border-box;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;margin:0px auto 10px;padding:0px 10px;border:0px;outline:0px;vertical-align:baseline;float:none;text-align:center;max-width:100%;min-height:1px;width:342.5px;"> <img class="columnImage" src="https://www.n-analytech.co.jp/archives/001/201602/99cd0b0eac39c6a572787301a2a386fb.gif" alt="" width="282" height="255" data-bd-imgshare-binded="1" style="box-sizing:border-box;vertical-align:middle;height:auto;margin:0px;padding:0px;outline:0px;background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-attachment:initial;background-origin:initial;background-clip:initial;" /> <p class="caption" _msttexthash="6194149" _msthash="126" style="box-sizing:border-box;margin:0px 10px 30px;padding:0px;border:0px;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">[等式3.4.2]</span> </p> </div> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <p _msttexthash="1742241436" _msthash="127" style="box-sizing:border-box;margin:0px 10px 30px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:0px;border:0px;outline:0px;vertical-align:baseline;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">（xA， yA）： 電流探頭 A 的 x，y 坐標(biāo) （cm） （xB， yB）： 電壓探頭 B 的 x，y 坐標(biāo) （cm） （xC， yC）： 電壓探頭 C 的 x，y 坐標(biāo) （cm） （xD， yD）： 電流探頭 D 的 x，y 坐標(biāo) （cm）</span> </p> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <div class="column-image-center js_notStyle acms-col-sm-6 nocaption" style="box-sizing:border-box;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;margin:0px auto 20px;padding:0px 10px;border:0px;outline:0px;vertical-align:baseline;float:none;text-align:center;max-width:100%;min-height:1px;width:342.5px;"> <img class="columnImage" src="https://www.n-analytech.co.jp/archives/001/201602/da27c184706370f34a8c014e69682edb.gif" alt="" width="419" height="44" data-bd-imgshare-binded="1" style="box-sizing:border-box;vertical-align:middle;height:auto;margin:0px;padding:0px;outline:0px;background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-attachment:initial;background-origin:initial;background-clip:initial;" /> </div> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <div class="column-image-center nocaption" style="box-sizing:border-box;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;margin:0px auto 20px;padding:0px 10px;border:0px;outline:0px;vertical-align:baseline;float:none;text-align:center;max-width:100%;width:439px;"> <img class="columnImage" src="https://www.n-analytech.co.jp/archives/001/201602/e7c0db71c741e42a260d35d41839c50c.png" alt="" width="419" height="43" data-bd-imgshare-binded="1" style="box-sizing:border-box;vertical-align:middle;height:auto;margin:0px;padding:0px;outline:0px;background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-attachment:initial;background-origin:initial;background-clip:initial;" /> </div> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <h3 _msttexthash="59014228" _msthash="128" style="box-sizing:border-box;line-height:1.1;margin:0px 10px 20px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:10px 0px;border-width:0px 0px 1px;border-top-style:initial;border-right-style:initial;border-bottom-style:solid;border-left-style:initial;border-top-color:initial;border-right-color:initial;border-bottom-color:#333333;border-left-color:initial;border-image:initial;outline:0px;vertical-align:baseline;"> <span style="font-size:12px;">5 體積電阻率和表面電阻率</span> </h3> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <p _msttexthash="258597885" _msthash="129" style="box-sizing:border-box;margin:0px 10px 30px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:0px;border:0px;outline:0px;vertical-align:baseline;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">使用該電阻率校正因子，體積電阻率和表面電阻率由[公式3.5.1][公式3.5.2]獲得。</span> </p> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <h5 _msttexthash="17833777" _msthash="130" style="box-sizing:border-box;line-height:1.1;margin:0px 10px 10px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:0px;border:0px;outline:0px;vertical-align:baseline;"> <span style="font-size:12px;">體積電阻率</span> </h5> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <div class="column-image-left" style="box-sizing:border-box;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;margin:0px 0px 10px;padding:0px 10px;border:0px;outline:0px;vertical-align:baseline;float:left;max-width:100%;width:214px;"> <img class="columnImage" src="https://www.n-analytech.co.jp/archives/001/201602/a6183efed738f05bff998d516556e116.gif" alt="" width="194" height="32" data-bd-imgshare-binded="1" style="box-sizing:border-box;vertical-align:middle;height:auto;margin:0px;padding:0px;outline:0px;background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-attachment:initial;background-origin:initial;background-clip:initial;" /> <p class="caption" _msttexthash="6194123" _msthash="131" style="box-sizing:border-box;margin:0px 10px 30px;padding:0px;border:0px;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">[等式3.5.1]</span> </p> </div> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <h5 _msttexthash="19947616" _msthash="132" style="box-sizing:border-box;line-height:1.1;margin:0px 10px 10px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:0px;border:0px;outline:0px;vertical-align:baseline;"> <span style="font-size:12px;">表面電阻率</span> </h5> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <div class="column-image-left" style="box-sizing:border-box;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;margin:0px 0px 10px;padding:0px 10px;border:0px;outline:0px;vertical-align:baseline;float:left;max-width:100%;width:133px;"> <img class="columnImage" src="https://www.n-analytech.co.jp/archives/001/201602/c23ddfcbb12a80a3912b21e72661c752.gif" alt="" width="113" height="32" data-bd-imgshare-binded="1" style="box-sizing:border-box;vertical-align:middle;height:auto;margin:0px;padding:0px;outline:0px;background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-attachment:initial;background-origin:initial;background-clip:initial;" /> <p class="caption" _msttexthash="6194305" _msthash="133" style="box-sizing:border-box;margin:0px 10px 30px;padding:0px;border:0px;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">[等式3.5.2]</span> </p> </div> <p _msttexthash="102730355" _msthash="134" style="box-sizing:border-box;margin:0px 10px 30px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:0px;border:0px;outline:0px;vertical-align:baseline;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">（這里，t是樣品的厚度（cm））</span> </p> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <p _msttexthash="2446410967" _msthash="135" style="box-sizing:border-box;margin:0px 10px 30px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:0px;border:0px;outline:0px;vertical-align:baseline;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">體積電阻率（單位：Ω?cm）是單位體積的電阻，盡管表達(dá)式因場而異，例如材料領(lǐng)域的體積電阻率，電子領(lǐng)域的比電阻率和物理學(xué)領(lǐng)域的電阻率，但它是物質(zhì)特有的物理量（在科學(xué)年表中描述），并用作許多材料電導(dǎo)率的**量度。</span> </p> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <p _msttexthash="2144989587" _msthash="136" style="box-sizing:border-box;margin:0px 10px 30px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:0px;border:0px;outline:0px;vertical-align:baseline;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">另一方面，表面電阻率（單位：Ω/□，Ω/平方，讀作歐姆珀平方）是單位面積的電阻，也稱為薄層電阻或簡稱表面電阻，用于涂膜和薄膜領(lǐng)域。 特別需要注意的是，根據(jù)[公式3.5.2]，表面電阻可能會與轉(zhuǎn)換前的電阻混淆。</span> </p> <p _msttexthash="1337318606" _msthash="137" style="box-sizing:border-box;margin:0px 10px 30px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:0px;border:0px;outline:0px;vertical-align:baseline;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">這種四探頭方法長期以來一直用于測量硅晶圓，無限大（無限?。┑臉悠沸枰?.532的值。 我們獲得了任意尺寸和測量位置的矩形和圓形樣品的校正因子，并對其進(jìn)行了實(shí)驗驗證。</span> </p> <p _msttexthash="1220606010" _msthash="138" style="box-sizing:border-box;margin:0px 10px 30px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:0px;border:0px;outline:0px;vertical-align:baseline;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">1994年12月，這種四探頭方法成為JIS標(biāo)準(zhǔn)（JIS K 7194）。 [Lorester-GP] 轉(zhuǎn)換并顯示矩形和圓形樣品的體積電阻率、表面電阻率和電導(dǎo)率以及上述電阻率校正系數(shù)。</span> </p> <h3 _msttexthash="80041" _msthash="139" style="box-sizing:border-box;line-height:1.1;margin:0px 10px 20px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:10px 0px;border-width:0px 0px 1px;border-top-style:initial;border-right-style:initial;border-bottom-style:solid;border-left-style:initial;border-top-color:initial;border-right-color:initial;border-bottom-color:#333333;border-left-color:initial;border-image:initial;outline:0px;vertical-align:baseline;"> <span style="font-size:12px;">6 JIS K 7194</span> </h3> <p _msttexthash="2859598248" _msthash="140" style="box-sizing:border-box;margin:0px 10px 30px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:0px;border:0px;outline:0px;vertical-align:baseline;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">[JIS K 7194]</span><br _istranslated="1" style="box-sizing:border-box;" /> <span style="font-size:12px;">規(guī)定樣品的標(biāo)準(zhǔn)尺寸為 80×50 mm t = 20 mm 或更小。</span><br _istranslated="1" style="box-sizing:border-box;" /> <span style="font-size:12px;">使用探頭間距為 5 mm 的探頭（標(biāo)準(zhǔn)連接的 ASP 探頭）以相等的間隔排列成直線進(jìn)行 1、5 或 9 個點(diǎn)的測量。 測量位置按[</span><span style="font-size:12px;">圖3.6 JIS K 7194測量位置</span><span style="font-size:12px;">]所示指定，五點(diǎn)測量被認(rèn)為是標(biāo)準(zhǔn)測量。</span><br _istranslated="1" style="box-sizing:border-box;" /> <span style="font-size:12px;">校正因子數(shù)據(jù)內(nèi)置于 [Loresta-GP] 中。</span> </p> <p _msttexthash="2196637859" _msthash="141" style="box-sizing:border-box;margin:0px 10px 30px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:0px;border:0px;outline:0px;vertical-align:baseline;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">（1） 在 1 點(diǎn)測量的情況下 （1） 僅 （2） 在 5 點(diǎn)測量的情況下，（1）、（2）、（3）、（4） 和 （5） （3） 的 5 點(diǎn) 在 9 點(diǎn)測量的情況下：通過在 （2） 的</span><br _istranslated="1" style="box-sizing:border-box;" /> <br _istranslated="1" style="box-sizing:border-box;" /> <span style="font-size:12px;">5 點(diǎn)上添加 （6）、（7）、（8） 和 （9） 來獲得 9 分</span> </p> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <div class="column-image-center" style="box-sizing:border-box;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;margin:0px auto 10px;padding:0px 10px;border:0px;outline:0px;vertical-align:baseline;float:none;text-align:center;max-width:100%;width:370px;"> <img class="columnImage" src="https://www.n-analytech.co.jp/archives/001/201602/a7140aad1661e8df28094acdc94b0a29.gif" alt="" width="350" height="400" data-bd-imgshare-binded="1" style="box-sizing:border-box;vertical-align:middle;height:auto;margin:0px;padding:0px;outline:0px;background-image:initial;background-position:initial;background-size:initial;background-repeat:initial;background-attachment:initial;background-origin:initial;background-clip:initial;" /> <p class="caption" _msttexthash="90242633" _msthash="142" style="box-sizing:border-box;margin:0px 10px 30px;padding:0px;border:0px;outline:0px;vertical-align:baseline;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;line-height:1.8em;overflow:visible;"> <span style="font-size:12px;">圖3.6 JIS K 7194測量位置（單位mm）</span> </p> </div> <hr class="clearHidden" style="box-sizing:content-box;border:none;height:0px;margin:0px;text-wrap:wrap;padding:0px;clear:both;visibility:hidden;" /> <p _msttexthash="2891105347" _msthash="143" style="box-sizing:border-box;margin:0px 10px 30px;text-wrap:wrap;background-image:url(&quot;../images/clear.gif&quot;);background-position:0px 0px;background-size:initial;background-repeat:no-repeat;background-attachment:initial;background-origin:initial;background-clip:initial;padding:0px;border:0px;outline:0px;vertical-align:baseline;line-height:1.8em;overflow:visible;"> &nbsp; &nbsp; &nbsp; 湖南中崎主要合作客戶有：關(guān)西涂料（ALESCO）、歐菲科技（O-film）、泰晶科技（TKD）、中芯國際(SMIC), 京東方(BOE)、華星光電(CSOT)、天馬（TIANMA）、柔宇（ROYOLE）、豐田（TOYOTA）、SUZUKI(鈴木）、比亞迪（BYD）、大疆（DJI）、艾華集團(tuán)(AISHI）、駿馬精密（ZAMA）、三一重工（SANY）、中聯(lián)重科（ZOOMLION）、山河智能SUNWARD、科力遠(yuǎn)CORUN、太平洋半谷PH、廣汽三菱MITSUBISHI MOTORS、住友橡膠SUMITOMO、藍(lán)思科技LENS、中車CRRC、三諾SINOCARE等，憑借專業(yè)銷售代理的經(jīng)驗，成熟的產(chǎn)品，贏得了廣大客戶的信任。&nbsp; &nbsp; &nbsp; &nbsp; &nbsp;&nbsp;<br /> <br /> &nbsp; &nbsp; &nbsp; 湖南中崎科技有限公司會恪守“誠信、品質(zhì)、快速、貼心”的服務(wù)宗旨，不斷提升專業(yè)的技術(shù)服務(wù)水平，與客戶及供應(yīng)商實(shí)現(xiàn)共同發(fā)展。通過減少中間環(huán)節(jié)，并提供便利的配送服務(wù)，將實(shí)惠和安心送到每一個客戶的手中。<br /> <br /> <br /> <div style="text-align:right;"> 京都玉崎株式會社-中部子公司 </div> <div style="text-align:right;"> 湖南中崎科技有限公司 </div> <div style="text-align:right;"> 2023.8.12 </div> </p>